A Novel 3D Topography Stitching Algorithm Based on Reflectance and Multimap

Surface topography is an efficient tool for the understanding of physical phenomena, especially if multiscale roughness analysis performed. However, observable scale range in a measured with 3D optical profilometers quite limited. Therefore, all scales linked to phenomenon might not be measured, which impedes correct surface. Stitching topographies, technique combining elementary topographic maps into larger one, can used increase objective lens. A high resolution over large field measurement then generated. literature review stitching algorithm highlights procedure, and detailed explanations on in-plane registration algorithms are provided. some existing sufficiently accurate surface, at smaller scales. This paper proposes new reflectance-based multimap three its variants. These variants compared (geometric, cross-correlation global optimization differences) four test cases, containing obtained surfaces (two focus variation microscopes two interferometers). Five qualitative quantitative criteria indicators proposed comparison algorithms: visual inspection, run time, memory usage, mean repositioning error estimator. Lastly, this article. Overall, based reflectance multimaps have lower estimator other algorithms. relevance case topographies. decision-helping tool, gain lift plot (SGL plot), described selection best given case. The SGL higher performance novel